China High Frequency Automatic Canon Fpa-3000 I4 Semiconductor Wafer Die Lithography Machine

We can provide lithography machines, etching machines, coating and developing systems or uniform coating and developing systems, thin film deposition equipment, ion implantation machines, oxidation/diffusion/annealing equipment, also known as heat treatment equipment

Pattern transfer: Just like a projector, the circuit patterns on the mask are projected onto the surface of a silicon wafer coated with photoresist through light. Microfabrication: Using ultraviolet light or extreme ultraviolet light, the photoresist undergoes a chemical reaction, and after development, fine nano-scale lines are etched onto the wafer.

The lithography machine utilizes the principle of optical projection to shrink the circuit patterns and expose them onto the silicon wafer coated with photoresist. It is the core equipment in chip manufacturing. Its essence is to achieve precise transfer of nanoscale graphics through the use of light sources, masks, and precise optical systems.

Display and Sensing: Electrode fabrication for flat panel displays (LCD/OLED), touchscreen sensors, and MEMS micro-electromechanical systems.

The precision of the lithography machine is limited by the wavelength of the light source and the numerical aperture of the optical system. Furthermore, the EUV light source needs to generate plasma through laser bombardment of tin droplets, which is an extremely difficult technical challenge.