Efficient Prometrix RS50 Measuring Instrument Used China Semiconductor M&I Equipment

We can provide Gelatinize machines, etching machines, coating and developing systems or uniform coating and developing systems, thin film deposition equipment, ion implantation machines,oxidation/diffusion/annealing equipment, also known as heat treatment equipment

The system operates under computer control, using an SMU (Source/Measure Unit) to apply voltage or current to the device and monitor its response. A switching matrix routes signals to the DUT pins contacted by the probe station, while a CMU (Capacitance Measurement Unit) performs 1 MHz capacitance/conductance measurements to acquire electrical parameters.

Designed for semiconductor process control monitoring (PCM) and device characterization, the system measures DC voltage/current as well as 1 MHz capacitance/conductance. It supports high-resolution measurements down to 20 fA for current, 4 UV for voltage, and 1 fF for capacitance covers ranges up to 200 V ,1 A, and enables the parallel execution of up to eight tests.

As an industry de facto standard, it is adopted by most semiconductor manufacturers worldwide. It is primarily used for process monitoring and development in integrated circuit manufacturing. It can test on-wafer devices, discrete devices, and packaged devices for parameter quality inspection, online anomaly feedback, and failure root cause analysis.

Key challenges include: meeting the more rigorous demands placed on C-V analysis by advanced MOS processes; ensuring high-precision, low-noise measurements across the entire 96-pin switch matrix; achieving high throughput while maintaining measurement accuracy for minute currents at the 20 fA level; and coordinating system integration with probe station control.