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Transparent Hcds Gas for Enhanced Silicon Nitride Deposition Efficiency
US$66.66
20 Pieces
Product profile
Customization
AvailableCAS No.
13465-77-5Formula
Si2cl6Model NO.
HCDSEINECS
236-704-1Constituent
Industrial Pure AirGrade Standard
Electronic GradeChemical Property
Colorless Liquid; Moisture-Sensitive ChlorosilaneMolecular Weight
268.88 G/MolGrade
Ald Grade / Electronic GradeAppearance
Colorless to Pale Yellow Transparent LiquidBoiling Point
144 °CDensity
1.56 g/cm3 (at 25 °C)Annual Production Capacity
Scalable Multi-Ton Production LineValve Type
Gas Phase: 1/4VCR Male, Liquid Phase: 1/4VCR FemalUn Number
2987Hazard Class
Class 8 (Corrosive Substance)Related Precursors
Dcs, Tcs, Sicl4, Bdeas, Btbas, TeosPlace of Origin
Suzhou, ChinaTransport Package
CylinderSpecification
6NTrademark
KAIMEIOrigin
ChinaKey features
High Purity ALD Grade: 6N (99.9999%) purity for advanced 3D NAND trench filling and sub-3nm logic nodes.
Excellent Step Coverage: Ensures conformal silicon nitride deposition with atomic film uniformity and low thermal budget.
Ultra-Low Metal Impurities: Guarantees defect-free films for high-performance semiconductor manufacturing processes.
Scalable Production: Supported by a scalable multi-ton production line ensuring stable supply for high-volume fabs.
Seamless Integration: Available in 1L to 38L 316L stainless steel canisters with dual 1/4VCR valves for ALD systems.
Quality Certified: Produced under ISO 9001:2015 with third-party purity checks and COA provided.
Company profile
CertifiedBusiness Type: Trading CompanyExport Year: 2020-10-01 CertifiedNearest Port: Shanghai PortAverage Response Time: ≤0.30h CertifiedTerms of Payment: LC, T/T CertifiedInternational Commercial Terms(Incoterms): FOB, CIF, CFR
About Our Factory & Business Background
AddressRoom 1104, Building B, Hengtai Ideal Innovation Building, No. 69 Jiuzhang Road, Suzhou Industrial Park, Suzhou, Jiangsu, China
Plant Area100 square meters
Registered Capital10,000,000 RMB
Average Lead TimePeak Season Lead Time: one month Off Season Lead Time: one month
Our Production Capability & Technical Expertise
Main ProductsElectronic Gas Disinfectant
Our Industry Experience & Global Business Record
Year of Establishment2016-08-18
Main MarketsSoutheast Asia/ Mideast
Number of Foreign Trading Staff6
Overseas Agent/BranchNo
Product Q&A
Q:What is the purity grade of HCDS?
A:
The product is 6N (99.9999%) ALD-grade silicon precursor, ensuring ultra-low metal impurities for defect-free films.
Q:What is the primary application of this gas?
A:
It is used for conformal silicon nitride (Si3N4) deposition in advanced 3D NAND high-aspect-ratio trench filling.
Q:Is third-party testing available?
A:
Yes, third-party purity checks are available, and the product is produced under ISO 9001:2015 standards.
Q:What is the lead time for orders?
A:
The average lead time is one month, applicable for both peak season and off-season periods.
Q:What are the payment terms?
A:
We accept LC (Letter of Credit) and T/T (Telegraphic Transfer) as terms of payment.
Send Inquiry
*To:Jiangsu Kaimei Electronic Materials Co., Ltd.
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