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Stable Operation 99.99999% Cl2 Pou Purification Equipment for Semiconductor Industry
US$2,200.00
1-4 Pieces
US$1,700.00
5+ Pieces
Product profile
Customization
AvailableApplication Fields
ChemicalCertification
ISOModel NO.
WB-POUCondition
NewGas Type
Argon, Carbon Dioxide, Helium, Hydrogen, Nitrogen, Oxygen, Nh3,Cl2,CDANoise Level
LowParts
FiltersPurification Method
AdsorptionPurification technology
Activated carbon purifierPurpose
Gas PurificationGas Source
N2/H2/O2/Ar/He/Nh3/Cl2/CO2/CDAParticles
≤1 PCS/M3, >0.003 UmStandard Flow Rate
1-2000 SlpmPressure (MPa)
1Pressure Drop (MPa)
0.1Trademark
WOBOOrigin
HenanHS Code
8421399090Production Capacity
1-2000L/MinKey features
7N-9N High-Efficiency Purification: Advanced adsorption purification technology enables deep purification of ultra-high-purity gases.
Deep Removal of Multiple Impurities: Targeted purification of trace O2, H2O, CO2, CO, H2, NMHC, and other contaminants.
Regenerable Purification Materials: Purification materials can be repeatedly regenerated and reused, extending service intervals while reducing consumable replacement and operating costs.
Low Operating Cost: The room-temperature adsorption process eliminates the need for continuous high-temperature operation, helping reduce energy consumption and overall operating costs.
Room-Temperature Operation: Operates under room-temperature conditions for stable performance and easy integration into point-of-use gas supply systems.
High-Precision Filtration: Filtration accuracy down to 0.003 um effectively controls particulate contamination in the gas delivered to the process.
High-Cleanliness Tubing: 316L EP-grade materials meet the stringent requirements of semiconductor and high-cleanliness gas delivery systems.
Point-of-Use Purification: Installed directly at the gas-use point to further control trace impurities that may be introduced during gas transport or through downstream piping.
Company profile

Business Type: Manufacturer/Factory, Group CorporationExport Year: 1996-07-09Nearest Port: Shanghai, QingdaoAverage Response Time: ≤6.55hTerms of Payment: LC, T/T, PayPal, etc.International Commercial Terms(Incoterms): FOB, EXW, CFR, CIF, Others, FCA
AI-Powered supplier vetting
SummaryWOBO Industrial Group Corp. is identified as a Chinese manufacturer/factory and group corporation based in Henan, with business coverage spanning industrial equipment, instruments, energy, manufacturing, electrical products, chemicals, and related services. The supplier reports more than 10 production lines, 21–30 R&D engineers, 11–20 quality-control staff, and multiple management-system certifications. Its offerings include hydrogen-generation, air-separation, gas-separation, cryogenic, and membrane equipment. Evidence indicates technical consulting, engineering design, installation, commissioning, training, turnkey projects, international trade experience, and broad export-market coverage. However, the provided information does not establish financial credibility, specific customer cases, or a demonstrated product-customization capability.
Supplier typeWOBO Industrial Group Corp. is explicitly classified as a Manufacturer/Factory and Group Corporation, with operations covering advanced manufacturing, industrial development, international trade, and multiple industrial sectors. This supports its identification as an industrial manufacturing supplier rather than solely a trading company.
CertificationsThe supplier reports OHSAS/OHSMS 18001, ISO 13485, ISO 14001, ISO 9001, ASME, and HACCP certifications. These stated certifications provide explicit evidence of formal management, quality, environmental, occupational-safety, medical-device, pressure-equipment, and food-safety-related systems, although the specific applicability of each certification to the target product is not provided.
After-Sales capabilityWOBO explicitly states that it provides technical consulting, engineering design, equipment installation and commissioning, technical training, turnkey projects, and sincere service support. These services indicate a documented capability to support customers beyond product delivery.
R&D capabilityWOBO states that it emphasizes scientific and technological innovation, exchanges with domestic and foreign research institutions and universities, adopts advanced design concepts, and develops emerging technologies and new processes. Its stated focus on hydrogen, green energy, gas separation, and advanced manufacturing supports an explicit innovation orientation.
Production capacityThe supplier reports more than 10 production lines, 21–30 R&D engineers, and 11–20 quality-control staff, while offering multiple equipment categories including hydrogen generators, air-separation plants, membrane-separation equipment, and cryogenic equipment. These stated resources and product scope provide explicit evidence of substantial production capability, although actual capacity by product is not detailed.
Product Q&A
Q:What impurities can be removed?
A:
It selectively removes trace impurities such as O2, H2O, CO2, CO, H2, and NMHC.
Q:Are the purification materials reusable?
A:
Yes, the materials are regenerable and can be reused multiple times.
Q:What is the standard flow rate range?
A:
The standard flow rate ranges from 1 to 2000 slpm.
Q:What material is used for the tubing?
A:
It uses 316L EP-grade high-purity tubing.
Q:Does the system require high temperature to operate?
A:
No, it operates under room-temperature conditions.
Send Inquiry
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WOBO Industrial Group Corp.
WOBO Industrial Group Corp.*Content:
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