Customization
AvailableApplication Fields
Semi,Fpd,Solar,LED, Electronic, Semi, Fpd, Solar, LEDCertification
CE, ISO, Semi S2, CE, ISOModel NO.
YYKJ-1500PWCondition
NewGas Type
Sih4,Sihcl3,HCl,Dcs,Teos,TmaNoise Level
LowParts
Gas TankPurification Method
Chemical ConversionPurpose
Gas PurificationCondition
NewGas Type
Argon, Helium, Hydrogen, Methane, NitrogenNoise Level
Ultra LowParts
ValvePurification Method
Chemical ConversionPurpose
Gas PurificationPurification Technology
Non-Thermal PlasmaApplication
IndustrialControl Mode
ButtonUsage
Exhaust Gas TreatmentProcessing Capacity
600-1500Actual Power
208/380VACInlet Ports
6 InletCw
10 ~20 Lpm (3 ~5 Kg/Cm²) 1/2''CDA
150 ~300 Lpm (3 ~5 Kg/Cm²) 1/2''N2
50 ~150 Lpm (3 ~5 Kg/Cm²) 1/2''Pcw
5 ~10 Lpm (3 ~5 Kg/Cm²) 1/2''Heat Drain
-20 ~ -40 Mmh2o.100 PipeAcid Drain
-80 ~ -100mmh2o Mf 100flangeTransport Package
Pallet/ContainerSpecification
YYKJ-600PW /YYKJ-1500PWTrademark
JANUSTECHOrigin
China