High Treatment Efficiency: Achieves 99% efficiency for general gases and 98% for NF3.
High Humidity Tolerance: Operates stably in high humidity; plasma technology unaffected by moisture.
Energy Saving Design: Low plasma energy consumption with recirculated water for minimal usage.
Smart Safety & Maintenance: Highly automated system with no warm-up time required for immediate use.
Wide Gas Compatibility: Treats SF6, CF4, CHF3, H2, PH3, and other acidic/alkaline gases.
Flexible Customization: Offers full, minor, and flexible customization from samples or designs.
Compact Industrial Design: Ensures compliance with strict emission standards in a compact footprint.
ISO Certified Quality: Manufactured under ISO9001, ISO45001, and ISO14001 management systems.