Silicon rotary sputtering target

When sourcing Silicon (Si) rotary targets, the purity level is paramount; for semiconductor or high-end optical applications, a purity of 99.99% (4N) to 99.999% (5N) is required. You must also specify the density, which should ideally be >2.30 g/cm³ to ensure a stable sputtering rate and minimize micro-arcing. Additionally, verify the electrical resistivity (typically <0.01 Ω·cm for DC sputtering) and the oxygen content (ideally <500 ppm) to prevent film contamination.

Rotary targets consist of a silicon tube bonded to a stainless steel or copper backing tube. It is critical to request an Ultrasonic Testing (UT) report to ensure a bonding ratio of >98%. Poor bonding leads to localized overheating and target cracking. Ensure the surface roughness (Ra) is less than 1.6 μm to reduce particle generation during the initial burn-in phase.

Suppliers should provide a Material Analysis Certificate (COA) performed via GDMS or ICP-OES to verify impurity levels. For international trade, ensure the manufacturer follows ISO 9001 for quality management and RoHS compliance for environmental safety. If the targets are used in the EU, check for REACH regulation adherence regarding chemical substances.

These targets are primarily used in Large Area Glass Coating (Low-E glass), Solar Cell (Photovoltaic) manufacturing, and Flat Panel Displays. A high-performance target should offer a long service life (high utilization rate of up to 75-80% compared to planar targets) and a consistent deposition rate across the entire length of the tube, which can exceed 3000mm in industrial coaters.

Silicon is extremely brittle and sensitive to thermal shock. You must mandate vacuum-sealed plastic packaging to prevent oxidation, followed by customized wooden crates with shock-absorbing foam. Ensure the shipment is marked as 'Fragile' and consider using impact indicators (e.g., ShockWatch labels) on the outer packaging to monitor handling during transit.

Focus on Total Cost of Ownership (TCO) rather than just the unit price. Negotiate based on target utilization rates and recycling programs; some suppliers offer credits for returning spent backing tubes. For large-scale projects, request tiered pricing based on annual volume and seek a fixed-price agreement for 6-12 months to hedge against fluctuations in raw silicon market prices.

Prioritize Audited Suppliers on Made-in-China.com who have undergone third-party inspections by agencies like SGS or Bureau Veritas. Use the Secured Trading Service to ensure payment is only released after you confirm receipt and inspection of the goods. Always request a pre-shipment inspection (PSI) to verify dimensions and purity before the balance payment is made.

Verify the HS Code (typically 2804.61 or 3818.00) to determine applicable import duties and anti-dumping duties in your region. Be aware of Export Control Licenses; high-purity silicon can sometimes be classified as a dual-use item depending on the country of origin. Ensure all Incoterms (e.g., CIF or DAP) are clearly defined in the contract to avoid disputes over unloading charges and local taxes.